Obtención de películas delgadas de (CdO)x(ZnO)1-x por la técnica de sol-gel y su caracterización

Abstract

In this work ZnOxCdO(1-x) thin films, (x = 0.24), were deposited on glass substrates by the Sol-Gel technique. The films were characterized by X-ray diffraction, Uv-vis spectroscopy, and were electrically measured by the four-point method. The films were doped with aluminum (1, 2%), fluorine (1, 2, 4%) and aluminum+fluorine (1,1%). X-ray measurements indicate that the films were polycrystalline containing a mixture of CdO and ZnO phases. The optical transmittance of the films of ZnO(0.24)CdO(0.76) was found between the one known for CdO and ZnO. A set of the post-deposited films were heat treated with forming gas in order to improve their properties. The latter treatment led to films with an improved counductivity of two orders of magnitude. From the results it can be concluded that the addition of both dopands (Al+F) is more efficient than the use of a single dopand (Al or F).